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Brooks Instrument: GF120xHT Series
The GF120xHT Series can precisely deliver vapor to the process chamber, even when that material is a liquid or a solid at room temperature. It is unique in its capability to support upgrades from Brooks Instrument’s legacy heated 9861 and VC4900 MFC series. With fast EtherCAT communication, programmable alarms and warnings developed specifically for advanced process control, and fault detection and classification (FDC) tracking, it is also ideal for next-generation platforms.
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